Crystal Systems, Inc. - Sapphire substrate specifications

Sapphire Substrate Specifications
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SAPPHIRE 2" EPI POLISHED SUBSTRATES
Crystal: LED Grade Sapphire
Sapphire purity: >99.99%
Orientation: (0001) C-axis, ą 0.2°
Diameter: 50.8 ą 0.25 mm
Thickness: 0.332 or 0.432 ą 0.025 mm
Primary Flat: (1120) A-axis ą 0.3°
Flat Length: 16.0 ą 1.5 mm
Front Side Surface: front side EPI polished, (Ra) ≤ 1 nm
Back surface Roughness: Fine grind, Rmax 5-10 µm
TTV: < 25 µm
BOW: < 20 µm
SAPPHIRE 2" DOUBLE SIDE POLISHED SUBSTRATES
Specifications: same as above except backside surface
Back surface Roughness: 80-50 or better backside
Packaging: vacuum packed in cassettes of 5, 10 or 25 in a class 100 clean room, under a nitrogen atmosphere
Cleanliness: Ready for EPI
Delivery: Standard Parts from stock, subject to availability, otherwise 8 weeks

SAPPHIRE 3" EPI POLISHED SUBSTRATES
Crystal: LED Grade Sapphire
Sapphire purity: >99.99%
Orientation: (0001) C-axis, ą 0.15°
Diameter: 76.2mm ą 0.25 mm
Thickness: 0.550 ą 0.025 mm
Primary Flat: (1120) A-axis ą 0.3°
Flat Length: 22.0 mm ą 1.5 mm
Front Side Surface: front side EPI polished, (Ra) ≤ 1 nm
Back surface Roughness: Fine Grind, Rmax 5-10 µm
TTV: < 30 µm
BOW: < 30 µm
SAPPHIRE 3" DOUBLE SIDE POLISHED SUBSTRATES
Specifications: same as above except backside surface
Back surface Roughness: 80-50 or better backside
Packaging: vacuum packed in Entegris cassettes of 5, 10 or 25 in a class 100 clean room, under a nitrogen atmosphere
Delivery: Standard parts from stock, subject to availability, otherwise 8-weeks

SAPPHIRE 4" EPI POLISHED SUBSTRATES
Crystal: LED Grade Sapphire
Sapphire purity: >99.99%
Orientation: (0001) C-axis, ą 0.20°
Diameter: 100 ą 0.25 mm
Thickness: 0.650 ą 0.025 mm
Primary Flat: (1120) A-axis ą 0.3°
Flat Length: 32.0 ą 2.5 mm
Front Side Surface: front side EPI polished, (Ra) ≤ 1 nm
Back surface Roughness: Fine grind, 0.4 - 1.0 microns (Ra)
TTV: < 40.0 µm
BOW: < 30.0 µm
SAPPHIRE 4" DOUBLE SIDE POLISHED SUBSTRATES
Specifications: same as above except backside surface
Back surface Roughness: 80-50 or better backside
Packaging: vacuum packed in Entegris cassettes of 5, 10 or 25 in a class 100 clean room, under a nitrogen atmosphere
Delivery: Standard parts from stock, subject to availability, otherwise 8-weeks

SAPPHIRE 10mm X 10mm X .432 mm EPI POLISHED SUBSTRATES
Crystal: LED Grade Sapphire
Sapphire purity: >99.99%
Orientation: (0001) C-axis, ą 0.2°
Length: 10.00mm
Width: 10mm
Thickness: 0.432mm
Front Side Surface: front side EPI polished,
(Ra) ≤ 1 nm
Back surface Roughness: Fine grind,
Rmax 5-10 µm
Packaging: vacuum packed in cassettes of (1) in a class 100 clean room, under a nitrogen atmosphere
Cleanliness: Ready for EPI
Delivery: Standard Parts from stock, subject to availability, otherwise 8 weeks

SAPPHIRE 10mm X10mm X .432mm DOUBLE SIDE EPI SUBSTRATES
Specifications: same as above except backside surface
Back Side Polish: EPI